项目                                       说明

镭射种类                                 ND:YAG Laser

镭射波长                                 1064nm/532nm/355nm/266nm

镭射功率(*大輸出)                        0.5mJ/pulse

Peak Power                               100W

1064波幅                                 4-6nsec

发振频率                                 1-50Hz

冷卻方法                                 水冷式

输出能量控制                             1000 steps for 0-100%※Hi/Low switch-able

Flash Lamp Life time                        1年或大于10000000shots

镭射器保固期                              1年

介面                                     RS-232

(依实际镭射配置规格为准)

1 Laser Slit

      项目                                       说明

                                       物镜倍率      加工尺寸

     修补尺寸                          NIR 50x 物镜    min: 1um x1um

                                     NIR 20x 物镜    max: 120um x 120um

2 光学影像系统

项目                                             说明

显微镜                                        观测/镭射加工专用型

CCD                                          1/2”Color CCD

落射光源                                      高亮度卤素光源系统(100W)

透射光源                                      高亮度卤素光源系统(150W)

Guide Light                                    高亮度卤素光源系统(100W)

物镜切换系统                                  4孔/电动切换式(线性)

3 精密物镜组

项目                                           说明

M Plan APO 5 x                                 观察

M Plan APO 10 x                                观察

M Plan NIR 20 x                                观察/镭射加工

M Plan NIR 50 x                                观察/镭射加工

4 自动对焦系统

项目                                           说明

对焦类型                                     手动式对焦

5 加工载台

项目                                           说明

主要功能                                      工件承载使用

材质                                          精密大理石平台

尺寸                                          400mm x 300mm

底座                                          大理石底座