NanoCalc 反射膜厚测量系统
 |
薄膜的光学特性主要有反射和干涉。NanoCalc薄膜反射测量系统可以用来进行10nm -250um的膜厚分析测量，对单层膜的分辨率为0.1nm。根据测量软件的不同，在1秒钟内可以分析单层或最多达到10层的膜厚。 |
|---|
产品特点
- 可分析单层或多层薄膜；
- 分辨率达0.1nm；
- 适合于在线监测；
使用原理
最常用的两种测量薄膜的特性的方法为光学反射和投射测量、椭圆光度法测量。NanoCalc利用反射原理，通过测量宽光谱范围内的反射率曲线来进行膜厚测量。
|
查找n和k值 可以进行多达十层的薄膜测量，薄膜和基体材质可以是金属、电介质、无定形材料或硅晶等。NanoCalc软件包含了大多数材料的n和k值数据库，用户也可以自己添加和编辑。
|
 |
|---|
应用
NanoCalc薄膜反射材料系统适合于在线膜厚测量，包括氧化层、中氮化硅薄膜、感光胶片及其它类型的薄膜。NanoCalc也可测量在钢、铝、铜、陶瓷、塑料等物质上的抗反射涂层、抗磨涂层等。
NanoCalc Systems Available
|
NANOCALC-2000-UV-VIS-NIR |
|
|
Wavelength: |
250-1100 nm |
|
Thickness: |
10 nm-70 um |
|
Light source: |
Deuterium and Tungsten Halogen |
|
NANOCALC-2000-UV-VIS |
|
|
Wavelength: |
250-850 nm |
|
Thickness: |
10 nm-20 um |
|
Light source: |
Deuterium and Tungsten Halogen |
|
NANOCALC-2000-VIS-NIR |
|
|
Wavelength: |
400-1100 nm |
|
Thickness: |
20 nm-10 um (optional 1 um-250 um) |
|
Light source: |
Tungsten Halogen |
|
NANOCALC-2000-VIS |
|
|
Wavelength: |
400-850 nm |
|
Thickness: |
50 nm-20 um |
|
Light source: |
Tungsten Halogen |
|
NANOCALC-2000-NIR |
|
|
Wavelength: |
650-1100 nm |
|
Thickness: |
70 nm-70 um |
|
Light source: |
Tungsten Halogen |
|
NANOCALC-2000-NIR-HR |
|
|
Wavelength: |
650-1100 nm |
|
Thickness: |
70 nm-70 um |
|
Light source: |
Tungsten Halogen |
|
NANOCALC-2000-512-NIR |
|
|
Wavelength: |
900-1700 nm |
|
Thickness: |
50 nm-200 um |
|
Light source: |
High-power Tungsten Halogen |
For Reflectometry applications, the following items are required:
|
NC-2UV-VIS100-2 |
Bifurcated UV fiber |
|
NC-STATE |
Single point reflection measurement for non transparent samples |
| Step-Wafer | 5 Steps 0-500 mm, calibrated 4" |
If using a microscope, the following items are also needed:
|
NC-7UV-VIS200-2 |
Reflection probe for application microscopy with MFA-C-Mount |
| Step-Wafer | 5 Steps 0-500 mm, calibrated 4" |
NanoCalc Specifications
|
Angle of incidence: |
90° |
|
Number of layers: |
3 or fewer |
|
Reference measurement needed: |
Yes (bare substrate) |
|
Transparent materials: |
Yes |
|
Transmission mode: |
Yes |
|
Rough materials: |
Yes |
|
Measurement speed: |
100 milliseconds to 1 second |
|
On-line possibilities: |
Yes |
|
Mechanical tolerance (height): |
With new reference or collimation (74-UV) |
|
Mechanical tolerance (angle): |
Yes, with new reference |
|
Microspot option: |
Yes, with microscope |
|
Vision option: |
Yes, with microscope |
|
Mapping option: |
6" and 12" XYZ mapping tables |
|
Vacuum possibilities: |
Yes |