边缘抛光机
Edge Polisher
The EPD is a system which improves the Wafer Edge by polishing patterned wafers. The EPD removes foreign and unwanted substances from the edge bevel at critical process nodes. SpeedFam is the pioneer of Edge Polishers for the production of prime wafers. We make use of this system with astonishing results on 300mm, 200mm, and 150mm wafers.
SpeedFam has shipped about 550 Edge Polishers for prime wafers since 1988. The SpeedFam Edge Polisher is the global standard in edge preparation used in prime wafer factories all over the world. SpeedFam supports 300mm, 200mm and 150mm prime wafer production.
EPD-300-X / EPD-200-X
The SpeedFam EPD is an Edge Polisher for improving wafer edges on 300mm, 200mm and 150mm patterned wafers. In comparison with etching or other edge processing such as simple cleaning, the EPD uses slurry polishing action to improve wafer edges drastically. It is equipped with a post polish clean unit to achieve dry in dry out processing.
EP-300-X /EP-200-X
The SpeedFam EP-X series are high throughput Edge Polishers for 300mm, 200mm and 150mm prime silicon wafers. As well as our unique three surface polishing (upper/lower bevels and wafer apex) we also provide orientation flat and notch region mirror polishing to remove damage and prepare the entire domain of the edge bevel
