Enclosure Dimensions
W x D x H – Footprint
680W x 1127D x 1536H mm – 1890H mm w/light tower
(26.77W x 62.3D x 56.5H in – 74.4H in w/ light tower)
Net Weight
485kg (1070lbs)
Effective Footprint – Clearances
Right, Left – 153 mm (6 in), Front – 680 mm (26.8 in)
Back – 483 mm (19 in) minimum
Chamber
Dimensions
457W x 610D x 457H mm (18W x 24D x 18H in)
Volume
127 liters (7776 in³)
Variable Electrode Configurations
Direct, Downstream, HTP Wide, HTP Narrow
Number of Shelf Positions
14
Shelf Pitch
25.4mm (1 in) for 600W
50.8mm (2 in) for 1000 W
Electrodes
Powered Electrode Dimensions -Working Area
349W x 425D mm (13.74 W x 16.73D in)
Ground (Perf.) Electrode Dimensions – Working Area
384W x 425D mm (15.1W x 16.73D in)
Floating Shelf Dimensions – Working Area
349W x 425D mm (13.74W x 16.73D in)
RF Power
Standard Wattage
600W
Frequency
13.56 MHz
Gas Control
Maximum Number of MFCs
4
Remote Interface
Software Controls
Plasmalink, Processlink
Vacuum Pump
Standard Vacuum Pump
50 CFM (50/60Hz) wet pump with oil mist eliminator
Facilities
Power Supply
220V, 25A, 50/60 Hz, 3-Phase, 8AWG, 4-Wire
380V, 25A, 50/60Hz, 3-Pahse, 8 AWG, 5-Wire
Process Gas Fitting Size & Type
.25-in. OD Swagelok Tube
Purity
Industrial grade or better
Pressure & Flow
Regulated from .69bar (10PSI) min. to 1bar (15PSI) max.
Purge Gas Fitting Size & Type
.25-in. OD Swagelok Tube
Purity
Industrial grade Nitrogen or CDA
Pressure & Flow
Regulated from 2bar (30PSI) min. to 5.5bar (80PSI) max.
Pneumatic Valves Fitting Size & Type
.25-in. OD Swagelok Tube
Purity
CDA, Oil Free, Dewpoint <=7°C /45°F, Particulate Size <5 micron
Pressure & Flow
Regulated from 3.4bar (50PSI) min. to 5.5bar (80PSI) max.
Exhaust
38mm (1.5 in.) OD Pipe Flange
Compliance
SEMI
S2, S8, E10, Cleanroom
International
CE marked
Ancillary Equipment
Gas Generators
Nitrogen, Hydrogen
Facilities Modules
Oil Filtration, Chiller, Scrubber
Shipping
Crate Dimensions
1520W x 1490L x 1850H mm (60W x 59L x 73H in.)
Gross Weight
641kg (1390lbs)