Sputtering for Au、Ag、Pt、W、Mo、Ta、Ti、Al、Si、ITO、and magnetic materials

 

base : 4inch 6inch 8inch

Uniformity: ≤±4%

Deposition rate：According to the different materials

Gas :  Ar、N2、O2 and customer order

baking： 120° or can be order

Film thickness monitor：can be order

Co-sptttering：can be order