Travel   185 x 235 mm (7.28 x 9.25 in)

Resolution   5.0 μm (0.2 mils)

Planarity < 10 μm

Theta travel (standard)  360°

Theta travel (fine) ± 5.0°

Theta resolution 7.5 x 10-3 gradient

Movement Control XY-guided puck air-vacuum control

Fine adjustment Micrometer

Optional XY Stage for TS150-ES

Planarity < 10 μm