2英寸氮化镓自支撑衬底
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产品型号
Item
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SF－ncA－Φ50
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SF－ncB－Φ50 | |
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尺寸
Size (mm)
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Φ50.0±0.5
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厚度
Thickness (um)
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330±25 | 430±25 | |
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总厚度变化
TTV (um)
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≤15
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弯曲度
BOW (um)
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≤20
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表面粗糙度
RMS (nm)
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≤0.2 (5umx5um)
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晶向
Orientation
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C-axis(0001)±0.5°
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导电类型
Conduction Type
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Un-doped
N-type
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N-type
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High-doped
N-type
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电阻率（300K） Resistivity（Ω.com）
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≤0.5
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≤0.05 | ≤0.01 |
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孔洞密度
Void Density（D≥50um）(pits/cm2)
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≤2
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位错密度
Dislocation Density
(cm-2)
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Grade A | Grade B | Grade C |
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105
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1～5×106
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5×106～1×107
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有效面积
Useable Surface Area
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>90% | ||
| 包装
Package
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Packaged in individual containers in a class 100 clean room environment. | ||