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4001027270
Travel 185 x 235 mm (7.28 x 9.25 in)
Resolution 5.0 μm (0.2 mils)
Planarity < 10 μm
Theta travel (standard) 360°
Theta travel (fine) ± 5.0°
Theta resolution 7.5 x 10-3 gradient
Movement Control XY-guided puck air-vacuum control
Fine adjustment Micrometer
Optional XY Stage for TS150-ES
Planarity < 10 μm
