Weight Around 1000kg With Microscope

•包含显微镜重量约1000公斤左右  

  Dimensions: 1000mmW*1400mmL*1400mmH   

•尺寸:  1000mm宽*1400mm长*1400mm高

  6" /8’’/12’’ chuck with Central Vacuum Hole and Vacuum rings for Sample holding, Independent control of each Vacuum channel

•6" /8’’/12’’ 卡盘，采用中心真空吸附孔和多圈真空吸附环固定样品，每个真空通道均独立控制                                      

  Super low noise triaxial Chuck and output Triaxial adapter      

•卡盘为三轴超低噪声结构，电学独立悬空，带triaxial 电学接口      

  Chuck Flatness: 5µm                                                        

•卡盘平整度：5µm                                                             

  The Standard Central Vacuum hole is 1mm diameter,Can be customized according to customer requirements.                                                       

•标准卡盘中心吸附孔为1mm直径，可以根据客户要求定制                                         

  Chuck Quick roll out mechanism for fast wafer exchange                                            

•带卡盘快速拉出机构，便于快速更换样品                                                             

  Probe Card and probe card holder are adaptable to the Platen                                   

•探针平台可以加装探针卡和针卡夹具                                                             

  Platen can load up to 12 pcs micropositioners when TopHat is removed                     

•在不安装八角盒时探针平台可以加装最多12个针座                                             

  Sealled Microchamber with high performance EMI/light/noise Shielding and frost Prevent

•高性能密闭微暗室有效的屏蔽EMI，光线和噪声同时保持干燥正压环境下样品在低温时无结霜                                                           

EMI屏蔽 > 30 dB (typical) @ 1 kHz to 1 MHz                                                   

光衰减    ≥ 130 dB                                                      

光谱噪声基底       ≤ -180 dBVrms/rtHz (≤ 1 MHz)                                                       

系统交流噪声       ≤ 5 mVp-p (≤ 1 GHz)                                                

  Optimized Microchamber for less CDA consumption                                          

•微暗室优化的腔体结构可以极大的减少干燥气体消耗量                                               

  Chuck X-Y-Z-Theta High Precison Motorised Stage and Controlling system                

•Chuck X-Y-Z-Theta 四轴高精度电动移动平台和控制系统                                           

  Chuck Driver Mechanism:Zero baklash Design，grinded ball screw and Linear Guide rail

•卡盘驱动机构:无回程差设计，研磨级循环滚珠丝杠和高精度导轨                         

  Motors:Low noise DC motor                                                          

•驱动电机:低噪直流电机驱动                                                            

  0.1 μm resolution linear Scales for all chuck stage axies                                              

•每一个轴均带0.1微米线性光栅尺                                                          

  Chuck X-Y-Z Travel Range:200mm*300mm*20mm                                                    

•Chuck X-Y-Z 三轴行程分别为200mm*300mm*20mm                                                

  Highest Speed:X/Y axis> 70mm/S,Z axis> 20mm/S                                                     

•最高移动速度:X,Y轴>70mm/S，Z轴> 20mm/S                                                           

  Step Size: As small as 0.1µm in X，Y and Z                                                          

•X,Y,Z向运动解析度：最小为0.1微米                                                            

  Repeatability: +-1µm                                        

•往返重复精度:+-1µm                                          

  Accuracy: +-2µm                                              

•绝对定位精度:+-2µm                                   

  Chuck Theta Range:+-10°                          

• Chuck角度旋转范围+-10°                         

  Theta resolution:0.0001°                             

• Chuck角度旋转精度：0.0001°                           

  Theta Repeatability: 0.0005°                        

•Theta往返重复精度:0.0005°                  

  Theta Accuracy: 0.001°                                                           

•Theta 绝对精度:0.001°                                                             

  Microscope X-Y-Z Motorised Stage and Controlling system                                       

•显微镜X-Y-Z 电动移动平台和控制系统              

  Microscope X-Y-Z Travel 2" x 2" x 5"                                      

•可调节显微镜在 X-Y-Z三轴 2" x 2" x 5" 范围内电动移动        

  Highest Speed:> 10mm/S                                                              

•最高移动速度:>10mm/S                                                           

  Step Size: As small as 0.1µm in X and Y                                                        

•移动解析度：最小为0.1微米                                                          

  Repeatability: +-1µm                                                             

•往返重复精度:+-1µm                                                        

  Accuracy: +-2µm                                                            

•绝对定位精度:+-2µm                                                        

  Computer Interface: RS232/485,TCP/IP,GPIB etc.                                                        

•计算机连接端口:RS232/485,TCP/IP,GPIB 等                                                          

  High Perfomance Vibration Free Table built in Design                                   

•一体化的高性能防震系统      

Option   Joystick

              •手动控制盒，带操纵杆     

                Gold Plating For Chuck   

              •Chuck镀金，具有更低的接触电阻 

                5Bar High pressure gas purge design to prevent HV electric arc       

              •腔体内5个大气压正压气体吹拂设计，有效避免高压放电 

                HV Chuck 10KV      

              •耐高压卡盘 10KV（带高压输出接口）  

                HC Chuck 500A      

              •耐大电流卡盘 500A（带kelvin大电流输出接口）