型 号
Model |
ZZS600 |
ZZS700 |
ZZS800 |
ZZS900 |
ZZS1100 |
ZZS1300 |
ZZS1800 |
真空室尺寸(直径×高)
Size of the vacuum chamber (diameter× height) |
Φ600×750 |
Φ710×850 |
Φ800×900 |
Φ900×1000 |
Φ1100×1300 |
Φ1300×1300 |
Φ1800×2000 |
极限真空度
Ultimate vacuum degree |
≤3.0×10-4Pa |
恢复真空时间
Time for vacuum recovery |
4.0×10-3Pa≤15min |
抽气系统
Pumping system |
扩散泵 Diffusion pump |
K-400 |
TK-500 |
K-600 |
K-630 |
TK-500×2 |
K-630×2 |
K-800×2 |
罗茨泵 Roots pump |
|
|
|
ZJP-150 |
ZJP-300 |
ZJP-300 |
ZJP-1200 |
机械泵 Mechanical pump |
2X-30 |
2X-70 |
2X-70 |
2X-70 |
2X-70 |
2X-70 |
2X-70,H-150×2 |
真空测量系统
Vacuum measuring system |
配三路数字复合真空计,两路低真空,一路高真空
Three-way digital compound vacuum gauge, two ways of low vacuum and one of high vacuum |
操作方式
Operation mode |
手动/自动
Manual/automatic |
工件夹具
Work piece holder |
Φ600 |
Φ640 |
Φ750 |
Φ840 |
Φ1040 |
Φ1240 |
Φ1720 |
工件烘烤系统
Work piece baking system |
上烘烤,铠装管状加热器加热,******温度350℃,PID自动控温及显示
Up baking; heated by sheathed tubular heating element; maximum temperature 350℃; PID automatic temperature control and display. |
蒸发源
Evaporation source
|
电阻蒸发源
Resistance evaporation source |
电阻蒸发源功率4KW(8V、600A)
Power of the resistance evaporation source: 4KW (8V, 600A) |
电子束蒸发源
Electron beam evaporation source
|
E型电子束蒸发源,功率6~10KW
Power of E-type electron beam evaporation source: 6-10KW |
膜厚监控系统
Monitoring system on depth of films |
光学膜厚监控,波长范围380-800nm,9o透反射光路,六位电动比较片带显示;石英晶体膜厚监控,美国SQC-310、IC/6
The optical film thickness monitor, a wavelength range of 380-800nm, 9otransflective optical path, six electric comparison sheet with display; quartz crystal thickness monitoring, the United States SQC-310, IC / 6 |
充气系统 charge systems |
自动压强仪2~510-2Pa
Automatic pressure instrument |
质量流量计:单路单显,双路双显
Mass flow meter: one way one display, dual way dual display |
离子辅助(选配)
Ion-assisted (optional) |
H6霍尔离子源、H10霍尔离子源、Φ12cm考夫曼离子源、Φ16cm考夫曼离子源
H6 Hall ion source, H10 Hall ion source, Φ12cm Kaufman ion source, Φ16cm Kaufman ion source |
深冷捕集器(选配)
Cryogenic trap (optional) |
国产12P、国产15P、进口POLYCOLD550、进口POLYCOLD670
Domestic 12P, 15P, POLYCOLD 550, POLYCOLD 670 |
动力需求
Power demand |
冷却水
Cooling water |
压力温度
Pressure and temperature |
压力:0.25~0.35MPa;温度≤25℃
Pressure: 0.25-0.35MPa; temperature ≤25℃ |
流量
Flow rate |
≥50L/min |
≥60L/min |
≥80L/min |
≥100L/min |
≥140L/min |
≥160L/min |
≥180L/min |
压缩空气
Compressed air |
压力:0.5~0.7MPa
Pressure: 0.5-0.7MPa |
******消耗电力
Maximum power consumption |
~25KW |
~35KW |
~40KW |
~45KW |
~50KW |
~60KW |
~120KW |
设备外形尺寸(宽×深×高)
Overall dimension (width×depth×height) |
2100×1800×2000 |
3350×2600×2370 |
3580×3000×2450 |
3870×3600×2670 |
3870×3600×2670 |
3900×4050×2950 |
4400×4000×3600 |
设备总重(KG)
Gross weight (Kg)
|
约1500
about 1,500 |
约2000
about 2,000 |
约2500
about 2,500 |
约3000
about 3,000 |
约3000
about 3,000 |
约4000
about 4,000 |
约6000
about 4,000 |