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4001027270
base : 4inch 6inch 8inch
Uniformity: ≤±4%
Deposition rate:According to the different materials
Gas : Ar、N2、O2 and customer order
baking: 120° or can be order
Film thickness monitor:can be order
Co-sptttering:can be order
购买之前,如有问题,请向我们咨询