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    OAI 30型UV光源

    应用于半导体行业:

    半导体加工设备-其他设备类

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    OAI

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    10000

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    全国

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    品牌:OAI

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    所属系列:半导体加工设备-其他设备类

     

    OAI 30型UV光源

    OAI 30型UV光源(显示有可选支架)由独立光源,恒定强度控制器和快门定时器组成。

    30型UV光源是高效的,可用于各种应用。光由椭圆形反射器收集并聚焦在积分/聚光透镜阵列上,以在曝光平面产生均匀的照明。这种紫外光源提供多种光束尺寸,最大24英寸平方,输出光谱范围从220 nm到450 nm,使用适当的灯(包括)。输出功率范围从200瓦到5千瓦。所有OAI UV光源都易于配备快速更换过滤器组件,使用户能够轻松定制输出光谱。可选配远程排气风扇。

    双通道强度控制器将光源强度控制到用户所需的水平,并在灯的使用寿命内保持恒定。控制器的功能双通道光学反馈允许从一个强度水平或光谱灵敏度调整到另一个。强度控制器具有用于监视灯强度和功率的视觉显示器。范围对于不同的强度级别自动缩放。当需要更换灯泡时,声音报警提醒操作员。

    快门定时器(用于独立曝光系统)激活光源快门。定时器范围为0.1到999秒。提供了用于控制其他快门速度的界面。

    Model 30 UV Light Source

    The OAI Model 30 UV Light Source (shown with optional stand) consists of a stand-alone light source, a constant intensity controller, and a shutter timer.

    The Model 30 UV Light Source is highly efficient and may be utilized in a variety of applications. Light is collected by an ellipsoidal reflector and focused on an integrating/condensing lens array to produce uniform illumination at the exposure plane. This UV light source is available in various beam sizes up to 24 inches square with output spectra ranging from 220 nm to 450 nm, using the appropriate lamp (included). Output power ranges from 200 watts to 5 kilowatts. All OAI UV Light Sources are easily equipped with quick-change filter assemblies, enabling the user to customize the output spectrum with little effort. Optional remote exhaust fans are available.

    Dual channel intensity controllers control light source intensity to a user-desired level and keep it constant over the lifetime of the lamp. Controllers’ feature dual-channel optical feedback allowing adjustment from one intensity level or spectral sensitivity to another. Intensity controllers feature a visual display for monitoring lamp intensity and power. Range scales automatically for different intensity levels. Audible alarms alert operator when a lamp change is required.

    The shutter timer (used with freestanding exposure systems) activates the light source shutter. The timer range is from 0.1 to 999 seconds. An interface for controlling other shutter speeds is available. 

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