AE Paramount 6013 6000W(13.56MHz)射频电源维修及销售_二手电源、射频_半导体二手设备_设备馆

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一、公司介绍

工程工作现场全景

扬州市神州科技有限公司成立于2003年，现有专业技术人员40人, 员工50人, 专业从事射频等离子体电源的维修、维护及销售，主要服务内容包括：为半导体工厂，液晶面板工厂等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等国际品牌的射频电源、直流电源、匹配器、RPS及各类半导体设备维修、销售、客户方案定制与老式机型替代，并提供现场支持服务。
公司主要客户：TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。

二、产品介绍

AE Paramount 6013 6000W(13.56MHz)射频电源

Electrical
Output Power
RF Power	6 kW
Regulation Modes	Standard: Forward, load
Regulation Modes	available: output voltage, external feedback loop
Frequencies	13.56 mHz
Frequencies	Frequency tuning ±5%
Frequency Resolution	1 Hz
Max Reflected Power	600 w, selectable
Power Accuracy	into 50 Ω: ±1 w or ±1% of set point, whichever is greater
Power Accuracy	into 3:1 VSwr: ±1 w or ±2% of set point, which ever is greater
Input Power	200/208 VaC ±10%, 50 to 60 Hz ±3 Hz
Available Features
Pulse Mode	Pulsing frequencies: 10 Hz to 100 kHz
Pulse Mode	Pulsing duty cycle: 10 to 90%
Pulse Synchronization	master/slave pulse coordination
Pulse Synchronization	individually programmable pulse on- and off-times
Frequency Tuning	< 10 ms tune time
Arc Management	Programmable arc-management parameters, including detect
Arc Management	time, shutdown time, and voltage level
Phase Synchronization (CEX)	output waveform synchronization for connected power supplies
Phase Synchronization (CEX)	user-adjustable phase offset, 0 to 359°
HALO	High accuracy, low output performance

Connector and Cable Specifications
Output Power	Female Hn
Input Power	Standard: Harting ® Han-Q with switch
Input Power	available: Harting ® Han-Q without switch
User Port	25-pin, female, sub-miniature D
Host Port	9-pin, female, sub-miniature D
I/O Control
Analog Interface	25-pin, female, sub-miniature D
Serial Interface	Standard: rS-232, ethernet
Serial Interface	available: ethernet, Devicenet ® , Profibus, etherCat ®

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三、品质保障

我们所销售的电源、匹配器及RPS等如无特殊说明，均提供6个月的免费保修服务。

我们为销售产品提供终身维修服务，并可提供EXCHANGE服务，保证客户的生产正常进行。

四、运输

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我们为所有出厂的机器提供最结实的包装，保证运输过程中机器的安全。