AE CESAR 1310 RF 13.56MHz(1000W) 射频电源维修及销售_二手电源、射频_半导体二手设备_设备馆

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一、公司介绍

工程工作现场全景

扬州市神州科技有限公司成立于2003年，现有专业技术人员40人, 员工50人, 专业从事射频等离子体电源的维修、维护及销售，主要服务内容包括：为半导体工厂，液晶面板工厂等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等国际品牌的射频电源、直流电源、匹配器、RPS及各类半导体设备维修、销售、客户方案定制与老式机型替代，并提供现场支持服务。
公司主要客户：TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。

二、产品介绍

AE CESAR 1310 RF Generator 13.56MHz(1000W) 射频电源

Specification
Frequency	13.560 MHz +/- 0.005%
Max output power	1000 W into a 50??load
Min output power	10 W into a 50??load
Reflected power limit	200 W
Delivered power into mismatch	20% depending on the load impedance
Load impedance	50Ω
RF connector	50Ω, N-type, female
RF power regulation mode	P forward, P delivered, or DC selfbias voltage
Regulation (of set point)	1.0 or 0.1% of full-rated power, whichever is greater, into a 50Ωload

Harmonics	-50 dBc at full-rated power
Spurious content	-60 dBc max at full-rated power
Pulse mode	Yes
Pulse repetition frequency	1 to 30 kHz
Pulse duty cycle	1% to 99%

CEX operation mode	Yes
CEX input signal as required	0 to +10 dbm
CEX output signal specifications	+3 to +10 dbm
CEX connector (50??)	BNC, female
Display	LCD graphic display
Display	256 x 132 dots , black / white

Cooling	Air cooling
Air cooling requirement	118 m/h3
AC Power Line
AC line voltage (1-phase)	230 VAC (187 AC to 253 VAC)
AC line frequency	50/60 Hz
AC line current (per phase)	6.5 A nominal line, full power
AC input power	1490 VA
Overcurrent limit (per phase)	10 A to be created by user through fuse or circuit breaker
Efficiency line to load	66% at full power, nominal line
Power factor	97% to 99% at max power
AC mains connection	IEC 320 at full power

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三、品质保障

我们所销售的电源、匹配器及RPS等如无特殊说明，均提供6个月的免费保修服务。

我们为销售产品提供终身维修服务，并可提供EXCHANGE服务，保证客户的生产正常进行。

四、运输

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我们为所有出厂的机器提供最结实的包装，保证运输过程中机器的安全。