装箱清单
美国BSI公司制造的Apogee Bake Plate
Hot-plate area: 10” x 10”
Substrate sizes: < 1 cm to 200 mm round and (max.) 8” square
Three automated bake methods: Contact, Vacuum, Proximity
Temperature resolution: 0.1°C
Temperature uniformity: <+/-0.3% across working surface at 100°C
Temperature range: Ambient to (max.) 300°C
Formula: (Highest Value - Lowest Value)/ (Average Value) x (100%) / 2
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