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Description | Specification |
Growing Method | CZ / FZ |
Grade | Prime, EPI-Prime, Test, Dummy |
Diameter | 2", 3", 4", 6", 8", 12" |
Type(Dopant) |
P(Boron) |
N(Phosphorus, Antimony, Arsenic) | |
Orientation | <100> / <111> |
Resistivity | Normal: 1~100Ω-㎝ |
Low: <1Ω-㎝ |
|
High: >1,000Ω-㎝, >10,000Ω-㎝ Etc. |
|
Thickness (인치별, Grade별 상이) |
Normal: Semi Standard |
Thic, Thin Thickness 가능 | |
Surface | Single Side Polished |
Double Side Polished | |
Etched | |
Particle | 各规格不同 |
Flatness(TTV, Bow, Warp) | 各规格不同 |
Maker | SK Siltron, STC, Ferrotec, SUMCO Etc. |
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