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Standard Dimensions and Tolerances for 150mm Diameter GaAs Wafers
|
Property |
Dimension |
Tolerance |
Units |
|
Diameter |
150 |
+/- 0.5 |
mm |
|
Thickness, Center Point |
|||
|
Option A |
675 |
+/- 25 |
µm |
|
Option B |
550 |
+/- 25 |
µm |
|
Notch Orientation |
[010] |
+/- 2 |
degrees |
|
Notch Depth |
1 |
+0.25/-0.0 |
mm |
Standard Dimensions and Tolerances for 100mm Diameter GaAs Wafers
| Property | Dimension | Tolerance | Units |
| Diameter | 100 | +/- 0.5 | mm |
| Thickness, Center Point | 675 | +/- 25 | µm |
| Primary Flat Lenght | 32.5 | +/- 2 | mm |
| Secondary Flat Lenght | 18 | +/- 2 | mm |
US/SEMI and E/J-Flat-Option available
Standard Dimensions and Tolerances for 200mm Diameter GaAs Wafers
| Property | Dimension | Tolerance | Units |
| Diameter | 200 | +/- 0.5 | mm |
| Thickness, Center Point | 625 | +/- 25 | µm |
| Notch Orientation | [010] | +/- 2 | degrees |
| Notch Depth | 1 | +0.25/-0.0 | mm |
Standard Dimensions and Tolerances for 3inch Diameter GaAs Wafers
| Property | Dimension | Tolerance | Units |
| Diameter | 76.2 | +/- 0.5 | mm |
| Thickness, Center Point | 625 | +/- 25 | µm |
| Primary Flat Lenght | 22 | +/- 2 | mm |
| Secondary Flat Lenght | 11 | +/- 2 | mm |
US/SEMI and E/J-Flat-Option available
